A novel method for stabilizing the photoelastic modulator used in a polarization modulated spectroscopic ellipsometer

✍ Scribed by Tomoyuki Fukazawa; Mitsuru Sano; Yu Yoshida; Nobuyuki Sakayanagi

• Book ID: 103429166
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 384 KB
• Volume: 234
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90292-w