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A novel fabrication method for stoichiometric strontium bismuth tantalate thin films for memory devices

โœ Scribed by J.P. Ponpon; R. Stuck; M. Amann


Book ID
106023050
Publisher
Springer
Year
2000
Tongue
English
Weight
52 KB
Volume
70
Category
Article
ISSN
1432-0630

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The dynamic vacuum wasca. torr during film formation and the molecular precursors were heated to a temperature defined as (80"-120 "C) so that sublimation/distillation into the heated chamber occurred at a rate of ca. 0.1 g/ h. The temperature gradient within the heated furnace was determined to be