✦ LIBER ✦
A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes
✍ Scribed by Dingbang Xiao, Xinghua Wang, Zelong Zhou, Xuezhong Wu…
- Book ID
- 120914871
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 379 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0946-7076
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