✦ LIBER ✦
A novel detection system for defects and chemical contamination in semiconductors based upon the Scanning Kelvin Probe
✍ Scribed by B. Lägel; I.D. Baikie; U. Petermann
- Book ID
- 117219227
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 115 KB
- Volume
- 433-435
- Category
- Article
- ISSN
- 0039-6028
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