A novel design of brush scrubbing in post-CMP cleaning

✍ Scribed by Qi, Zuqiang (author);Lu, Wanjia (author);Lee, Weiming (author)

• Book ID: 122783624
• Publisher: Elsevier Ltd
• Year: 2014
• Tongue: English
• Weight: 924 KB
• Volume: 85
• Category: Article
• ISSN: 0890-6955
• DOI: 10.1016/j.ijmachtools.2014.05.003