๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

A novel approach to the deposition of piezoelectric thin films

โœ Scribed by Edward D. Goff; Steven D. Braymen


Book ID
119125371
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
354 KB
Volume
21
Category
Article
ISSN
0167-577X

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Approach to control deposition of ultra
โœ Igor K. Igumenov; Pyotr P. Semyannikov; Sergei V. Trubin; Natalia B. Morozova; N ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 775 KB

Atomic layer deposition (ALD) processes have attracted attention during the past decade as a method allowing one to obtain high-quality thin films of various materials including metal oxides, metal nitrides and pure metals. Here we investigated a novel pulse method for the deposition of ultra thin f