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A Novel Application of the FIB Lift-out Technique for 3-D TEM Analysis

✍ Scribed by Jon C. Lee; David Su; J.H. Chuang

Book ID
108361864
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
621 KB
Volume
41
Category
Article
ISSN
0026-2714

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✍ Giannuzzi, Lucille A.; Drown, Jennifer L.; Brown, Steve R.; Irwin, Richard B.; S πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 449 KB πŸ‘ 2 views

A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation lift-out procedures we