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A Nonequilibrium Molecular Dynamics Study of In-Plane Thermal Conductivity of Silicon Thin Films

✍ Scribed by Tai-Ming Chang; Chien-Chou Weng; Mei-Jiau Huang

Book ID
107456948
Publisher
Springer US
Year
2010
Tongue
English
Weight
381 KB
Volume
39
Category
Article
ISSN
0361-5235

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Thermal conductivity (TC) of thin films will be influenced by boundary if the thickness is close to the mean free path (MFP). In this paper, we calculate the TC of crystalline and amorphous SiO 2 thin films, which are commonly used materials in micro devices and Integrated Circuits, by nonequilibriu