✦ LIBER ✦
A nondestructive analysis technique for residual thin films in deep-submicron contact holes
✍ Scribed by Ken Ninomiya; Tokuo Kure; Yoshimi Sudo; Katsuhiro Kuroda; Hideo Todokoro
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 400 KB
- Volume
- 100-101
- Category
- Article
- ISSN
- 0169-4332
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