A nondamaging beam blanking SEM test method and its application to highly integrated devices

✍ Scribed by Makihara, A.; Kuboyama, S.; Matsuda, S.; Nemoto, N.; Ohtomo, H.; Furuse, K.; Baba, S.; Hirose, T.

• Book ID: 127254182
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 151 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9499
• DOI: 10.1109/23.983194