A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining
✍ Scribed by H. Shinno; H. Yoshioka; K. Taniguchi
- Publisher
- International Academy for Production Engineering
- Year
- 2007
- Tongue
- English
- Weight
- 903 KB
- Volume
- 56
- Category
- Article
- ISSN
- 0007-8506
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✦ Synopsis
The importance of nano-machining processes is continually increasing in a wide range of industries. In particular, the demands for machining with stable nanometer order accuracy in a wide work area have recently increased in the electronics and automotive industries. In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this study, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The results of actual machining tests confi rmed that the developed table system has a remarkable performance.