Oxygen ions with energy in the range 4-15 keV O' were used to synthesize surface oxide layers by bombarding Si samples at di β erent angles of incidence with respect to the surface normal. High-resolution Rutherford backscattering spectroscopy and channelling were used to determine both the stoichiom
β¦ LIBER β¦
A new way of producing ion beams from metals and gases using the plasma jet from a duoplasmatron
β Scribed by R. Masic; J.M. Sautter; R.J. Warnecke
- Publisher
- Elsevier Science
- Year
- 1969
- Weight
- 252 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0029-554X
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