✦ LIBER ✦
A new universal method of monitoring layer parameters and surface roughness in vacuum deposition and etching processes
✍ Scribed by A. M. Baranov; S. A. Tereshin; I. F. Mikhailov
- Book ID
- 110120613
- Publisher
- Springer
- Year
- 1997
- Tongue
- English
- Weight
- 64 KB
- Volume
- 42
- Category
- Article
- ISSN
- 1063-7842
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