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A New Unconditionally Stable Algorithm for Steady-State Fluid Simulation of High Density Plasma Discharge

โœ Scribed by Choe, Hee Hwan (author);Yoon, N. S. (author);Kim, S. S. (author);Choi, Duk In (author)


Publisher
Academic Press Inc.
Year
2001
Tongue
English
Weight
96 KB
Volume
170
Category
Article
ISSN
0021-9991

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โœฆ Synopsis


A new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge is suggested. The physical origin of restriction on simulation time step is discussed and a new method to overcome it is explained. To compare the new method with previous other methods, a one-dimensional fluid simulation of inductively coupled plasma discharge is performed.


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