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A new type of laser-induced surface damage of GaAs

✍ Scribed by Mitsuru Okigawa; Takeyoshi Nakayama; Kazuyoshi Takayama; Noriaki Itoh


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
291 KB
Volume
49
Category
Article
ISSN
0038-1098

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A copper ΓΏlm mirror was irradiated using a pulsed Nd:YAG laser (1:06 m; 10 ns) through an aperture. After laser irradiation, the damaged spot was analyzed using an optical microscope and periodic damage rings were found at the laser irradiation spot, the average spacing of these rings being about 40