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A new type of cryopump with a metal cryopanel cooled below 3.6 K by a two-stage GM refrigerator

✍ Scribed by Y Iwasa; S Ito

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 487 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(96)00044-9

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