A new type of combined bipole deflector for a rf glow discharge ion source

✍ Scribed by Tong Linsu; Cui Zheng; Mao Fuming

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 185 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)94064-w