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A new type of columnar grain structure in obliquely deposited films

โœ Scribed by K. Hara; K. Itoh; M. Kamiya; K. Okamoto; T. Hashimoto; H. Fujiwara


Book ID
113320715
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
202 KB
Volume
148
Category
Article
ISSN
0304-8853

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