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A new theory of SIMS at metal surfaces

✍ Scribed by Michele Cini


Book ID
118981430
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
532 KB
Volume
54
Category
Article
ISSN
0039-6028

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Quantitative trace metal analysis of sil
✍ Douglas, M. A.; Chen, P. J. πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 249 KB πŸ‘ 2 views

Volumetric relative sensitivity factors (RSFs) are determined for 52Cr, 56Fe and 58Ni in an silicon O 2 '-formed oxide using a 12 keV Ga' primary ion beam, and the inΓ‘uence of matrix oxygen content on these RSF values is evaluated. A multivariate expression for RSF values as a function of oxygen con