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A new test facility for efficient evaluation of MEMS contact materials

✍ Scribed by Yang, Z; Lichtenwalner, D; Morris, A; Menzel, S; Nauenheim, C; Gruverman, A; Krim, J; Kingon, A I


Book ID
125478455
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
985 KB
Volume
17
Category
Article
ISSN
0960-1317

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