✦ LIBER ✦
A new SPM interferometer for displacement measurement at high velocity: U. Minoni, F. Docchio, 37th International Instrumentation Symposium, San Diego, CA, 5–9 May 1991, 997–1008 1129 pages
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 137 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0141-6359
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