A new simple and reliable method to form a textured Si surface for the fabrication of a tunnel oxide film

✍ Scribed by Kow-ming Chang; Chii-horng Li; Bao-sheng Sheih; Ji-yi Yang; Shih-wei Wang; Ta-hsun Yeh

• Book ID: 126734983
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 108 KB
• Volume: 19
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/55.669730