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A new self-alignment technology for sub-quarter-micron-gate FETs operating in the Ka-band
✍ Scribed by Yanokura, E.; Mori, M.; Hiruma, K.; Takahashi, S.
- Book ID
- 114551993
- Publisher
- IEEE
- Year
- 1989
- Tongue
- English
- Weight
- 562 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0018-9480
- DOI
- 10.1109/22.32232
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