A new rf plasma oxidation method for the insulating AlOx barrier in magnetic tunneling junctions

✍ Scribed by K.S Yoon; J.Y Yang; J.H Park; W.J Choi; Y.D Kim; C.O Kim; J.P Hong

• Book ID: 104443735
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 165 KB
• Volume: 2
• Category: Article
• ISSN: 1567-1739
• DOI: 10.1016/s1567-1739(02)00139-6