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A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE® Surfaces

✍ Scribed by C. Fanara; P. Shore; J.R. Nicholls; N. Lyford; J. Kelley; J. Carr; P. Sommer


Book ID
101409608
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
429 KB
Volume
8
Category
Article
ISSN
1438-1656

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