✦ LIBER ✦
A new process for defect-free definition of active areas in deep trench isolated bipolar devices
✍ Scribed by G Fallico; C Rapisarda; PJ Ward; R Zambrano
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 193 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0167-9317
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