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A new operating regime for electroplating the gold absorber on x-ray masks

✍ Scribed by W.J. Dauksher; D.J. Resnick; W.A. Johnson; A.W. Yanof

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 460 KB
Volume: 23
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90145-7

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