A new multi-layer ion implantation model for process simulation : D. Pantic, S. Mijalkovic and N. Stojadinovic. Microelectron. J.20(6), 5 (1989)

• Book ID: 103286891
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 110 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90668-d