A new microstructured silicon substrate for ultrathin gas-sensitive films

✍ Scribed by A. Schütze; U. Weber; J. Zacheja; D. Kohl; W. Mokwa; M. Rospert; J. Werno

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 742 KB
• Volume: 37-38
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(93)80127-3