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A new methodology for developing a fast two-dimensional MOSFET device simulator

✍ Scribed by Ruey-Kuen Perng; Pole-Shang Lin; Ching-Yuan Wu

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
874 KB
Volume
34
Category
Article
ISSN
0038-1101

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## Abstract In this paper, a methodology is proposed for expediting the coupled electro‐mechanical two‐dimensional finite element modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of th