✦ LIBER ✦
A new method utilizing Ti—silicide oxidation for the fabrication of a MOSFET with a self-aligned Schottky source/drain
✍ Scribed by Yachi, T.; Suyama, S.
- Book ID
- 119938990
- Publisher
- IEEE
- Year
- 1983
- Tongue
- English
- Weight
- 329 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0741-3106
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