✦ LIBER ✦
A new method to obtain reproducible measurements on single-wavelength, single-angle-of-incidence, null-seeking, polarizer-compensator-sample-analyzer ellipsometers
✍ Scribed by John C. Panner; Edward W. Conrad; Jack L. Rogers
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 748 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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