✦ LIBER ✦
A new method to fabricate thin oxynitride/oxide gate dielectric for deep submicron devices
✍ Scribed by L. Manchanda; G.R. Weber; Y.O. Kim; L.C. Feldman; N. Moryia; B.E. Weir; R.C. Kistler; M.L. Green; D. Brasen
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 279 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0167-9317
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