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A New Method to Extract Piezoresistive Coefficients in Polysilicon Through Gauges Placed on a MEMS Membrane
✍ Scribed by Salette, A.; Lefevre, R.; Déhan, C.; Morfouli, P.; Montès, L.
- Book ID
- 123474079
- Publisher
- Elsevier
- Year
- 2012
- Tongue
- English
- Weight
- 344 KB
- Volume
- 47
- Category
- Article
- ISSN
- 1877-7058
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