A new method of noncontact measurement f
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H.J Pahk; W.J Ahn
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Article
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2001
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Elsevier Science
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English
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In this paper, a new type of noncontact/nondestructive measuring method has been developed, comprising a new optical probe, precision stages, and controllers. The new optical probe has been designed using the reflected slit beam through the optical window. The optical measurement system has been imp