Electrostatic discharge failure factor o
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Kouichi Suzuki; Tetsuo Muranoi; Manabu Takeuchi
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Article
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1998
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John Wiley and Sons
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English
β 276 KB
π 2 views
The electrostatic discharge (ESD) sensitivities of highly refined ULSIs should be evaluated by a test method based on the direct-charging charged device model (D-CDM) or the field-induced charged device model (F-CDM). The CDM features nanosecond transient response and high peak current, as compared