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A New Method of Electron Temperature Determination in Unmagnetized and Magnetized RF Plasmas without RF Compensating Circuit

✍ Scribed by Y.-S. Choi; B.-K. Lee; K.-S. Chung


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
301 KB
Volume
44
Category
Article
ISSN
0005-8025

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