✦ LIBER ✦
A new method for the investigation of stress in MIS devices using SEM: G E Davis and M E Taylor, J Vac Sci Technol, 19 (4), 1981, 1024–1029
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 188 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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