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A new method for investigating the columnar structure of dielectric thin films

✍ Scribed by T. Chudoba


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
474 KB
Volume
131
Category
Article
ISSN
0040-6090

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πŸ“œ SIMILAR VOLUMES


Thin film electrode: a new method for th
✍ B.J. Seddon; M.J. Eddowes; A. Firth; A.E. Owen; H.H.J. Girault πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 587 KB

A method is presented for the construction of nanometer scale band electrodes based on thin film laminate materials . The electrodes are made using established thin film deposition techniques including metal evaporation and polymer spin coating . Such methods permit fabrication of highly uniform sub