✦ LIBER ✦
A new method for determining electron beam proximity correction parameters in a double layer siloxane-diazo resist system
✍ Scribed by Jones, Fletcher; Paraszczak, Jurij; Speth, Albert
- Book ID
- 120592855
- Publisher
- American Institute of Physics
- Year
- 1984
- Tongue
- English
- Weight
- 833 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.333305
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