✦ LIBER ✦
A New Measuring Method for Spindle Error Motion using a Cube-corner Prism and Laser Interferometers. I. Principle of the Method and Preliminary Experiment: N. Ozawa, Y. Kitamura, T. Kohno, K. Mitsui, Y. Okazaki, J. Jpn. Soc. Precis. Eng. (Japan)., 56(2), pp. 381-7. (Feb. 1990)
- Book ID
- 107889031
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 143 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0141-6359
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