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A new material for the fabrication of thin film resistors

โœ Scribed by M. A. Angadi; S. M. Shivaprasad


Publisher
Springer
Year
1984
Tongue
English
Weight
247 KB
Volume
3
Category
Article
ISSN
0261-8028

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Thin film electrode: a new method for th
โœ B.J. Seddon; M.J. Eddowes; A. Firth; A.E. Owen; H.H.J. Girault ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 587 KB

A method is presented for the construction of nanometer scale band electrodes based on thin film laminate materials . The electrodes are made using established thin film deposition techniques including metal evaporation and polymer spin coating . Such methods permit fabrication of highly uniform sub