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A new low-resistance tungsten microelectrode

✍ Scribed by J.C. Nussbaumer

Book ID
104170657
Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
234 KB
Volume
3
Category
Article
ISSN
0165-0270

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Low resistivity tungsten for contact met
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✍ Steven Smith; Khaled Aouadi; Josh Collins; Eric van der Vegt; Marie-ThΓ©rese Bass πŸ“‚ Article πŸ“… 2005 πŸ› Elsevier Science 🌐 English βš– 283 KB

A new pulsed nucleation tungsten process, called ''PNL low-R s W'', has been developed that results in near-bulk resistivity even in ultra-thin tungsten films. This solution greatly diminishes the need to develop alternative films for contact fill, probably for several generations. The process is do