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A New Interdigital Electrode Transducer Geometry

✍ Scribed by Lakin, K.M.; Mih, D.W.T.; Tarr, R.M.


Book ID
119819612
Publisher
IEEE
Year
1974
Tongue
English
Weight
665 KB
Volume
22
Category
Article
ISSN
0018-9480

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πŸ“œ SIMILAR VOLUMES


Properties of interdigital electrode arr
✍ M. Paeschke; U. Wollenberger; C. KΓΆhler; T. Lisec; U. Schnakenberg; R. Hintsche πŸ“‚ Article πŸ“… 1995 πŸ› Elsevier Science 🌐 English βš– 848 KB

## Interdigital array (IDA) microelectrodes have been fabricated by photolithographic and electron-beam lithographic techniques on silicon substrates. Thin-film noble metal electrodes have been deposited on a titanium-adhesion layer. The electrode width and space varied between 1 and 2 pm and betw