A novel serial high frequency surface ac
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Sheng Lei; Chao Deng; Yuquan Chen; Yang Li
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Article
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2011
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Elsevier Science
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English
β 804 KB
A novel topology of surface acoustic wave (SAW) humidity sensor was proposed. An interdigital electrode (IDE) was added in serial with a SAW resonator (SAWR) as the sensitive component. Silicon-containing polyelectrolyte humidity sensitive film was deposited on the surface of IDE instead of SAWR. By