✦ LIBER ✦
A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200
✍ Scribed by R. Hellín Rico; J.-P. Celis; K. Baert; C. Van Hoof; A. Witvrouw
- Book ID
- 106185249
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 315 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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