✦ LIBER ✦
A new failure mechanism and its improvement on gate oxide reliability at field edge by LOCOS isolation
✍ Scribed by Takahashi, M.; Uchida, H.; Nagatomo, Y.; Hirashita, N.; Ino, M.
- Book ID
- 114534936
- Publisher
- IEEE
- Year
- 1992
- Tongue
- English
- Weight
- 270 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0018-9383
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