A new fabrication technology for AlGaAs/GaAs HEMT LSIs using InGaAs nonalloyed ohmic contacts

✍ Scribed by Kuroda, S.; Harada, N.; Katakami, T.; Mimura, T.; Abe, M.

• Book ID: 114536177
• Publisher: IEEE
• Year: 1989
• Tongue: English
• Weight: 847 KB
• Volume: 36
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.40900