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A new fabrication method for waveguides with controlled surface-interaction length

✍ Scribed by F. Rehouma; D. Persegol; A. Kevorkian


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
308 KB
Volume
29
Category
Article
ISSN
0925-4005

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✦ Synopsis


The use of integrated waveguides with a limited interaction region in contact with a sensitive medium presents great potentialities for the development of optical sensors. In this paper, we describe a new fabrication process of ion-exchange waveguides well suited for integrated sensor applications. The principle of fabrication is as follows. During the first step, a channel waveguide is generated at the surface of a glass substrate by thermal ion-exchange. Then a rectangular pattern mask is transferred onto the central portion of the waveguide by standard photolithographic techniques. During the second step, the wafer is immersed in a molten salt and an external electric field is applied across the glass substrate. As the aluminium mask acts as a blocking barrier, only the unmasked regions of the waveguide are buried whereas its central region remains located close to the surface. For a single-mode waveguide at 780nm, we measured propagation losses of 0.13 dB/cm for the buried portion, 2.80 dB/cm for the surface portion and losses of 0.40 dB for the transition region. For this structure, we also observed a deformation of the fundamental mode. The proposed method is easy to implement and permits the topography of the elaborated waveguides to be controlled precisely.


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