A new environmentally stable protective group for deep UV resists: Methoxy(tetrahydropyranyl) ether

✍ Scribed by Reinhold Schwalm; Horst Binder; Dirk Funhoff

• Book ID: 101339830
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 279 KB
• Volume: 78
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/1097-4628(20001003)78:1<208::aid-app250>3.0.co;2-2